Influence of Substrate Surface Properties on Laser-induced Damage Properties of TiO2 Thin Films


  • G Jinman
  • S Junhong
  • C Lei
  • X Junqi



Various investigations have focused on the laser-induced damage of thin films. However, substrate surface properties have not been taken into account. TiO2 thin films with a one-quarter wavelength optical thickness were deposited by electron beam evaporation on two types of substrates with different surface properties. The surface morphologies of TiO2 thinfilms were captured by atomic force microscopy, and the laser-induced damage threshold of TiOthin films was measured. The relationship between the substrate surface properties and the laser-induced damage properties of TiOthin films was observed and analyzed.


F. Bonneau, P. Combis, J. L. Rullier, J. Vierne, B. Bertussi, M. Commandré, L. Gallais, J. Y. Natoli, I. Bertron, F. Malaise, and J. T. Donohue, Numerical simulations for description of UV laser interaction with gold nanoparticles embedded in silica, Appl. Phys. B. 2004, 78: p. 447-452.

Boulder Damage Symposium, proceedings, Proc. of SPIE. 1969 to 2005.

T. W. Walker, A. H. Guenther, and P. Nielsen: IEEE J.Quantum Electron. 1981,17: p. 2053.

Cheng Xu, Jianke Tao, Jianyong Ma, Yunxia Jin, Jianda Shao, Laser-induced damage threshold in n-on-1 regime of Ta2O5 films at 532, 800, and 1064nm, CHINESE OPTICS LETTERS. 2007, 5(12): p. 727-729.

Nobu Kuzuu, Kunio Yoshida, Hidetsugu Yoshida, Tomozumi Kamimura, and Naoyoshi Kamisugi, Laser-induced bulk damage in various types of vitreous silica at 1064, 532, 355, and 266nm: evidence of different damage mechanisms between 266-nm and longer wavelengths, Applied Optics. 1999, 38(12): p. 2510-2515.

J. Capoulade, J. Y. Natoli, B. Bertussi, M. Pommies, A. Dyan, D. Damiani, H. Piombini, Influence of the laser beam size on laser-induced damage in KH2PO4, Proc. of SPIE. 2007, p. 6403.

Lei Yuan, Yuan’an Zhao, Hongbo He, Jianda Shao, Femtosecond laser induced damage of optical coatings, CHINESE OPTICAL LETTERS, 2007, 2: p. s257-s259.

M. Mero, J. Liu, and W. Rudolph, Scaling laws of femtosecond laser pulse induced breakdown in oxide films, Phys. Rev. B 2005, 71: p. 115109.

Weidong Gao, Meiqiong Zhan,ShuhaiFan, Janda Shao, Zheng-Xiu Fan, Laser-induced damage of Ta2O5/SiO2 narrow-band interference filters under different 1064 nm Nd:YAG laser modes, Appl. Surf. Science, 2005, 250: p. 195-202.

F. Demichelis, E. Mezzetti-Minetti, L. Tallone, and E. Tresso, Optimization of optical parameters and electric field distribution in multilayers, Appl. Opt. 1984, 23: p. 165-171.

Congjuan Wang, Zhaoxia Han, Yunxia Jin, Jianda Shao, Zhengxiu Fan, Enhanced laser induced damage threshold of dielectric antireflection coatings by the introduction of one interfacial layer, CHINESE OPTICS LETTERS, 2008, 6(10).

JeremeiCapoulade, Laurent Gallais, Jean-Yves Natoli, and Mireille Commandre, Multiscale analysis of the laser-induced damage threshold in optical coatings, APPLIED OPTICS, 2008, 47(29): p. 5272-5280.

G.Abromavicius, R.Buzelis, R.Drazdys, A.Melninkaiis, V.Sirutkaitis, Influence of electric field distribution on laser induced damage threshold and morphology of high reflectance optical coatings, Proc. of SPIE. 2007, p. 6720.

D.G.Stearns, J.K.McIver, and E.Spiller, Localized defects in multiplayer coatings, Thin Solid Film, 2004, 446: p. 37-49.

S.Papernov, A.W.Schmid, R.Krishnan,and L.Tsybeskov, Using colloidal goldnanoparticals for studies of laser interaction with defects in thin films, Proc. of SPIE. 2001, 4347: p. 146-154.

ISO 11254-21, Determination of laser-damage threshold of optical surface—part 1:1-on-1 test, (2002).

Krishna M G, Rao K N, Mohan S, Structure and optical properties of zirconia thin films, Thin Solid Films, 1990, 193-194: p. 690-695.

Yong Gan, Jixiang Shi, and Shan Jiang, Atomic-level study of a thickness-dependent phase change in gold thin films heated by an ultrafast laser, Appl. Opt. 2012, 51(24), p. 5946-5951.

Oliver Apel, Michael Schulz-Grosser, Uwe Leinhos, Michael Kennedy, Klaus R. Mann, Rainer G. Schuhmann, Interfacial absorption of DUV coatings, Proc. of SPIE ,2001:p.4347.

Junqi XU, Junhong Su, Lingxia Hang, Yaojin Cheng, Influence of electric field on laser damage properties of DLC films by unbalanced magnetron sputtering, Applied Surface Science, 2012: p.265,.

ShiGang Wu, ZhiLin Xia, JianDa Shao, Kui Yi,Zheng Xiu Fan, Laser induced defect damage on optical thin film, Proc. of SPIE.,2013, 6279.

Zhang Dongping, Li Yan, Luo Jingting, Zheng Zhuanghao, Liang Guangxing, Cai Xingmin, Ye Fan, Fan Ping, Huang Jianjun, Microstructure and 355nm Laser-Induced Damage Characteristics of Al2O3 Films Irradiated with Oxygen Plasma under Different Energy, Optics and Photonics Journal, 2013, 3: p. 152-157.

M.Mansuripur, A.Neville Connell and J.W.Goodman, Laser-induced local heating of multilayers, Appl. Opt. 1982, 21(6): p. 1106-1114.



How to Cite

Jinman, G., Junhong, S., Lei, C. and Junqi, X. (2016) “Influence of Substrate Surface Properties on Laser-induced Damage Properties of TiO2 Thin Films”, The International Journal of Multiphysics, 10(1), pp. 1-10. doi: 10.21152/1750-9548.10.1.1.