The effect of different step-size on the visualization of crystallographic defects using SEM/EBSD technique


  • Y Higa
  • K Shimojima
  • T Makishi



Crystallographic grains and defects play an important role in many fundamental processes, such as grain growth and recrystallization, damage, and plastic deformation. Due to the importance of these processes, there is considerable interest in characterizing the crystallographic orientation and grain boundary distribution of crystalline materials. In this study, crystallographic defects such as dislocation arrays and grain boundaries and their orientations were investigated in a commercial polycrystalline copper sample using electron backscatter diffraction (EBSD) mapping combined with scanning electron microscopy (SEM). EBSD was used to determine the local orientations at individual points of a regular grid on a planar surface of a specimen. From the orientation differences between neighboring points, the lattice curvature and dislocation density tensor were derived, and the dislocation density distribution accompanying the crystallographic defects was significantly dependent on the SEM/EBSD step size associated with the spatial resolution.


Barnard, J. S., Sharp, J., Tong, J. R. and Midgley, P. A. High-Resolution Three-Dimensional Imaging of Dislocation, Science, 2006, 313, 319.

Hata, S., Kimura, K., Gao, H., Matsumura, S., Doi, M., Moritani, T., Barnard, J. S., Tong, J. R., Sharp, J. and Midgley, P. A. Electron Tomography Imaging and Analysis of γ' and γ domains in Ni-based Superalloys, Advanced Materials, 2008, 20, 1905-1909.

Barabash, R. I., Ice, G. E. and Pang, J. W. L. Gradients of geometrically necessary dislocations from white beam microdiffraction, Materials Science and Engineering, 2005, A400-401, 125-131.

Field, D. P., Trivedi, P. B., Wright, S. I. and Kumar, M. Analysis of local orientation gradients in deformed single crystals, Ultramicroscopy, 2005, 103, 33-39.

Pantleon, W. Resolving the geometrically necessary dislocation content by conventional electron backscattering diffraction, Scripta Materialia, 2008, 58, 994-997.

He, W., Ma, W. and Pantleon, W. Microstructure of individual grains in cold-rolled aluminum from orientation inhomogeneities resolved by electron backscattering diffraction, Materials Science and Engineering, 2008, A494, pp. 21-27.

Schwartz, A. J., Kumar, M. and Adams, B. L. Electron Backscatter Diffraction in Materials Science, Kluwer Academic/Plenum Publishers, 2000.

Bunge, H. J., "Texture Analysis in Materials Science, Mathematical Methods", Butterworths-Heinemann, Lodon, 1982.



How to Cite

Higa, Y., Shimojima, K. and Makishi, T. (2015) “The effect of different step-size on the visualization of crystallographic defects using SEM/EBSD technique”, The International Journal of Multiphysics, 9(1), pp. 37-44. doi: 10.1260/1750-9548.9.1.37.




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